FCM 6104

全自动激光Wafer Marking系统

Auto laser wafer marking system
高效率、高精度的晶圆标印wafer marking系统,提供多种不同形式的标印形式,包含英文字符串、数字字符串、条形码、2D code、QR code等,提升产品追溯性与产品识别性。

Precision and efficiency laser wafer marking system from FitTech provides multiple marking forms, including texts, numbers, barcodes, 2D code, QR code, etc., for product identification and traceability through the manufacturing process.

       
  • 產業Markets:

    半导体
    Semiconductor manufacturing

  • 應用Applications:

    晶圆标印、打印、標記
    Wafer marking

  • 材料Materials:

    硅晶圆、碳化硅、砷化镓等
    Silicon(Si) , Silicon Carbide(SiC), GaAs, Sapphire, Compound wafer etc.

 


■ 支援4吋-6吋晶圆标印
   Support 4” to 6” wafer marking
■ 高质量、高产能稳定加工
   High quality, throughput and reliability production
■ 机台占地小
   Small footprint
■ 高可读性标印
   Highly-readable marks
■ 喷溅少,设备维护容易
   Cleanliness level
■ 气冷式雷射
   Laser air cooling system